List of Entegris GateKeeper Purification System (GPS) with Part Numbers
Full details of our variety of different models, gases purified, media type, max flow rate, contaminants removed.
A new era in elastomer technology.
A brown colour high performance elastomer that has unique self-reinforcing polymer structure and does not contain any fillers. Due to the high purity, it is suitable for semiconductor processes.
A red/ brown high performance polymer elastomer that has unique self-reinforcing polymer structure and does not contain any fillers. Due to the high purity, it is suitable for semiconductor processes involving lower feature sizes. This material has low coefficient of thermal expansion, low compression set and has an extremely low etch rate in aggressive plasma environments.
A dark brown high performance elastomer that has unique self-reinforcing polymer structure and does not contain any fillers. Due to the high purity, it is suitable for semiconductor processes involving lower feature sizes. Low adhesion and high strength also makes it ideal for dynamic applications.
How the hybrid material (a cross between FKM & FFKM) can produce an excellent low erosion yet low cost option for customers.
This is a translucent brown advanced fluoropolymer that is reinforced with semi-crystalline perfluoropolymer nano-particles. Absence of metallic or carbon-based fillers makes it exceptionally pure. This compound bridges the gap between FKM and higher cost FFKM.
NBS EVO Datasheet
Full details of NBS WPC EVO Specifications, Capabilities, Compatibility, Key Features and Benefits.
About Perlast Polymer Technology, Compatibility and Applications.
Translucent beige colour, semi-crystalline perfluoropolymer with nano-filler that is highly compliant. Suitable for dynamic seals such as gate valves or door seals. Similar to G74P except material is softer.
White, highly reinforced perfluoroelastomer that is suitable for solar and FPD (flat panel display) applications. Offers extended seal life and excellent plasma resistance.
Translucent beige colour, semi-crystalline perfluoropolymer with nano-filler that is extremely low in outgassing properties. Ideal for vacuum application. Similar to G67P except material is harder.
Black multi-purpose high temperature perfluoroelastomer compound that is specially formulated to provide increased acid resistance. It has low permeability and less prone to swelling.
Off-white high temperature perfluoroelastomer. Compound is specially developed for plasma and gas deposition application.
Ivory coloured perfluoroelastomer that is cost effective yet exhibit chemical resistance. Suitable against a wide range of chemicals and solvents. Product can be used in many industrial applications.
Clear, highly reinforced perfluoroelastomer with high temperature stability. Exceptionally pure, with no inorganic filler which may cause particulation problems.
Good for static seals used in wet or dry sub 45 nm node processes.
Perlast® ICE range of perfluoroelastomers (FFKM) from PPE for sealing applications with extreme low temperature performance of as low as -46°C.
Perlast Helios G7HA
High temperature perfluoroelastomer for semiconductor applications, outstanding sealing performance over 300°C, excellent overall plasma resistance.
V74C is a black fluoroelastomer (FKM) material with ultra-low compression set. It is able to retain its mechanical properties significantly longer than conventional FKM grades under extreme high temperature cycling.
V75SC is a white colored fluoroelastomer (FKM) with extremely high Fluorine content. Is used for demanding applications within semiconductor and flat panel display (FPD) industries. It has superior purity, chemical resistance and plasma resistance compared to best performing FKMs whilst delivering cost advantages over FFKMs.
Combination chemical and particulate filter that integrates Purafil® patented dry-scrubbing media into a nonwoven fiber matrix.
Combination chemical and particulate filter designed to remove airborne molecular contaminants (AMC) in FFU applications upstream of HEPA/ULPA filters.
PURAFILTER® CG PANEL FILTER
Adsorbent-loaded nonwoven fiber filter designed to remove airborne molecular contamination (AMC) from the air in makeup and recirculation air handlers.
Purafil’s PK-18 and PK-12 MediaPAK™ Modules
Durable, adhesive-free construction with highly aerodynamic airfoil screens, easy access sampling ports and the patented Posi-Track™ Purafil technology to help in improving indoor air quality, removing odors and preventing corrosion.
Revolutionary filter designed to supply a large amount of chemical filtration with minimal amount of pressure drop.
Reducing ESD In Fluid Handling
By adding a conducive layer on external of PFA tubing, customers can reduce risk of explosion in fabs for solvents.
Bubble (White Paper)
Entegris flowmeter using differential pressure method provides better flow accuracy compared to traditional methods due to the presence of bubbles in fluid.