Slit Valve Door

Our Slit Valve Door extends seal life, improved performance and reduced the total cost of ownership.

 

Silicon Connection partners Polymer Precision Engineering (PPE) in providing a wide range of bonded Slit Valve Door (SVD) designs using high purity elastomer seals developed specifically for aggressive semiconductor sealing applications. PPE’s slit valve doors have been preferred by a variety of OEM.

Our proven semiconductor-grades elastomers: Perlast®, Kimura® & Nanofluor® minimize contamination in plasma environments.

In additional to materials know-how, seal designs are also optimised to remove localized stresses, which will again improve reliability and seal life, thus reducing costs.

 

Contact us on your specific requirements for Slit Valve Doors!

Kimura Slit Valve Doors & Centering Rings

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