Slit Valve Door
Our Slit Valve Door extends seal life, improved performance and reduced the total cost of ownership.
Silicon Connection partners Polymer Precision Engineering (PPE) in providing a wide range of bonded Slit Valve Door (SVD) designs using high purity elastomer seals developed specifically for aggressive semiconductor sealing applications. PPE’s slit valve doors have been preferred by a variety of OEM.
Our proven semiconductor-grades elastomers: Perlast®, Kimura® & Nanofluor® minimize contamination in plasma environments.
In additional to materials know-how, seal designs are also optimised to remove localized stresses, which will again improve reliability and seal life, thus reducing costs.
Contact us on your specific requirements for Slit Valve Doors!