Chemical Dispensing System
The Entegris Chemical Dispensing System connects the chemical containers to deliver bulk chemical. Entegris Sentry® QCIII Quick Connect System is a patented connection system that uses Entegris’ Flaretek® connection. Main chemical line uses Flaretek® connection, with subsequent ports having radial seals with FEP (Fluorinated ethylene propylene) encapsulated o-rings.
Sentry® QCIII Quick Connect System is a safe and easy system that gives leak-free connection using Flaretek® connection technology. Wetted parts of dispense head are made of PFA (Perfluoroalkoxy), FEP (Fluorinated ethylene propylene), and Kalrez® 4001 materials. Wetted parts of drum insert are made of PFA or polyethylene with FEP (Fluorinated ethylene propylene) encapsulated o-rings.
The o-rings that seal the dispense head and drum insert are located on the dispense head. This minimises the number of change outs required during standard maintenance. There is also specially designed change out tools that allow for simple and quick o-rings change outs on the dispense head and drum insert shipping cap.
It is ideal for high-flow chemical semiconductor applications, with a recirculation port which allows chemical recirculation and reduces chemical agitation. The drum insert can incorporate a return diffuser that reduces chemical foaming during recirculation. The dispense head incorporates two check valves to seal off back flow after disconnecting.
With over 50 years of experience in purity materials and material handling, Entegris has in-depth knowledge of material sciences and solutions to help support front-end to back-end device manufacturing processes.
Drum Adaptor Customisation
Solution for mismatch drum-insert and drum opening thread of chemical drums in semiconductor and related industries.